With this paper, The brand new lapping slurry and sharpening slurry are introduced. And the deliquescence diploma of CLBO is fallen to least expensive. A different Operating engineering is usually adopted. After tough sharpening, the concentration of extremely-precision sprucing slurry is greater correctly. So does the extremely-precision sprucing pace, and the wiping velocity is faster when compared to the deliquescence pace. The CLBO crystal area roughness can accomplish 1nm and retain the surface high quality well. Accessibility by means of your institution
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We summarized the current advancement position of the large-ability DUV laser both in the wavelength of FHG of your 1-μm laser and at 193 nm. The new progress in the good-point out/fiber laser, along with the nonlinear optical crystals, prompts not just the typical electrical power but in addition the beam good quality (coherence) on the DUV lasers to an unprecedented level.
全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
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LBO is usually an outstanding nonlinear crystal which is usually applied to the SHG from the NIR to your eco-friendly. The DUV laser is often realized by two levels of SFG during the LBO crystals given that there isn't any stage-matching angle for LBO to convert the environmentally friendly laser at 515 nm or 532 nm towards the DUV instantly by SHG [sixteen]. Lately, the NSBBF crystal has also demonstrated its probable to get a significant conversion effectiveness from 532 nm to 266 nm. The wander-off angle and deff of your NSBBF are Nearly just like All those of CLBO [17].
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The heartbeat duration of the 2nd Stokes gentle was shortened to 5 ns as revealed in Figure 7a, a single-shot picture with the oscilloscope, that's a typical phenomenon in Raman laser [44] although the pulse length with the pump laser was 10 ns.
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The beam profile revealed in Determine 7b demonstrated a great beam good quality as one of several merits of Raman laser, which would be valuable to make a 193-nm DUV laser with a top quality beam.
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The event from the 193-nm laser was demonstrated by levels of SFG. To be able to scale the DUV laser power successfully, a different thought from the 193-nm DUV laser generation is introduced determined by the diamond Raman laser.